Societe de Production et de Recherches Appliquees Sopra
10Patents
1Active
10Granted
33Portfolio score
Filing activity: Jan 21, 1998 → Sep 11, 2006 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6819423B2 | High spatial resolution infrared ellipsometer | Physics | 29 | Expired |
| US6014401A | Device for controlling a laser source with multiple laser units for the energy and spatial optimization of a laser surface treatment | Electricity | 13 | Expired |
| US6014260A | Optical device for homogenizing a laser beam | Physics | 7 | Expired |
| US6687002B2 | Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like | Electricity | 6 | Expired |
| US5991037A | High spatial resolution ellipsometry device | Physics | 6 | Expired |
| US6055346A | Fibre optic device for homogenizing a laser beam | Physics | 4 | Expired |
| US7763394B2 | Protected pattern mask for reflection lithography in the extreme UV or soft X-ray range | Physics | 3 | Expired |
| US6310903A | Gas laser device and integrated gas purifying means | Electricity | 0 | Expired |
| US7714992B2 | Equipment and method for monitoring an immersion lithography device | Physics | 0 | Active |
| US7230701B2 | Compact spectroscopic ellipsometer | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.