Patent assignee · FR · COMPANY

Societe de Production et de Recherches Appliquees Sopra

10Patents
1Active
10Granted
33Portfolio score

Filing activity: Jan 21, 1998 → Sep 11, 2006 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6819423B2 High spatial resolution infrared ellipsometer Physics 29 Expired
US6014401A Device for controlling a laser source with multiple laser units for the energy and spatial optimization of a laser surface treatment Electricity 13 Expired
US6014260A Optical device for homogenizing a laser beam Physics 7 Expired
US6687002B2 Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like Electricity 6 Expired
US5991037A High spatial resolution ellipsometry device Physics 6 Expired
US6055346A Fibre optic device for homogenizing a laser beam Physics 4 Expired
US7763394B2 Protected pattern mask for reflection lithography in the extreme UV or soft X-ray range Physics 3 Expired
US6310903A Gas laser device and integrated gas purifying means Electricity 0 Expired
US7714992B2 Equipment and method for monitoring an immersion lithography device Physics 0 Active
US7230701B2 Compact spectroscopic ellipsometer Physics 0 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.