Patent assignee · DE · COMPANY

Steag MicroTech GmbH Donaueschingen

1Patents
0Active
1Granted
27Portfolio score

Filing activity: Jan 13, 1995 → Jan 13, 1995

Most-cited patents

PatentTitleAreaCited byStatus
US5569330A Method and device for chemically treating substrates Emerging Cross-Sectional Technologies 61 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.