Patent assignee · IL · COMPANY

Tevet Process Control Technologies Ltd.

4Patents
0Active
4Granted
31Portfolio score

Filing activity: Feb 7, 2001 → Oct 28, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6678055B2 Method and apparatus for measuring stress in semiconductor wafers Physics 65 Expired
US6885467B2 Method and apparatus for thickness decomposition of complicated layer structures Physics 53 Expired
US6801321B1 Method and apparatus for measuring lateral variations in thickness or refractive index of a transparent film on a substrate Physics 43 Expired
US6762838B2 Method and apparatus for production line screening Emerging Cross-Sectional Technologies 38 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.