ULTRA CLEAN TECHNOLOGY, INC.
1Patents
0Active
1Granted
20Portfolio score
Filing activity: Aug 14, 2000 → Aug 14, 2000
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6610168B1 | Resist film removal apparatus and resist film removal method | Emerging Cross-Sectional Technologies | 16 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.