Patent assignee · COMPANY

ULTRA CLEAN TECHNOLOGY, INC.

1Patents
0Active
1Granted
20Portfolio score

Filing activity: Aug 14, 2000 → Aug 14, 2000

Most-cited patents

PatentTitleAreaCited byStatus
US6610168B1 Resist film removal apparatus and resist film removal method Emerging Cross-Sectional Technologies 16 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.