Veeco-CVC, Inc.
2Patents
0Active
2Granted
22Portfolio score
Filing activity: Aug 4, 1998 → Oct 3, 2000
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6471830B1 | Inductively-coupled-plasma ionized physical-vapor deposition apparatus, method and system | Electricity | 26 | Expired |
| US6592728B1 | Dual collimated deposition apparatus and method of use | Electricity | 12 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.