Patent assignee · US · COMPANY

Wyko, Inc.

63Patents
0Active
63Granted
39Portfolio score

Filing activity: Sep 27, 1985 → Jul 31, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US5133601A Rough surface profiler and method Physics 126 Expired
US5471303A Combination of white-light scanning and phase-shifting interferometry for surface profile measurements Physics 117 Expired
US6185315A Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map Physics 99 Expired
US5555471A Method for measuring thin-film thickness and step height on the surface of thin-film/substrate test samples by phase-shifting interferometry Physics 93 Expired
US4639139A Optical profiler using improved phase shifting interferometry Physics 87 Expired
US5355221A Rough surface profiler and method Physics 83 Expired
US5129724A Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample Physics 83 Expired
US5602643A Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface Physics 78 Expired
US4832489A Two-wavelength phase-shifting interferometer and method Physics 69 Expired
US5116115A Method and apparatus for measuring corneal topography Human Necessities 62 Expired
US5122648A Apparatus and method for automatically focusing an interference microscope Physics 51 Expired
US5172002A Optical position sensor for scanning probe microscopes Emerging Cross-Sectional Technologies 40 Expired
US5640270A Orthogonal-scanning microscope objective for vertical-scanning and phase-shifting interferometry Physics 39 Expired
US5204734A Rough surface profiler and method Physics 39 Expired
US4984893A Phase shifting device and method Physics 37 Expired
US5483064A Positioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopy Emerging Cross-Sectional Technologies 36 Expired
US5635016A Transfer ring or drum apparatus with adjustable circumference Performing Operations; Transporting 36 Expired
US5173746A Method for rapid, accurate measurement of step heights between dissimilar materials Physics 34 Expired
US5196713A Optical position sensor with corner-cube and servo-feedback for scanning microscopes Emerging Cross-Sectional Technologies 33 Expired
US5446547A Combination of motorized and piezoelectric translation for long-range vertical scanning interferometry Physics 33 Expired
US5618374A Belt and tread drum for vehicle tire making machine Performing Operations; Transporting 32 Expired
US5173605A Compact temperature-compensated tube-type scanning probe with large scan range and independent x, y, and z control Emerging Cross-Sectional Technologies 31 Expired
US5987189A Method of combining multiple sets of overlapping surface-profile interferometric data to produce a continuous composite map Physics 29 Expired
US5064286A Optical alignment system utilizing alignment spot produced by image inverter Physics 26 Expired
US5354405A Bead lock drum for use in the manufacture of vehicle tires Performing Operations; Transporting 25 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.