Positioning mechanism and method for providing coaxial alignment of a probe and a scanning means in scanning tunneling and scanning force microscopy
US5483064A · kind A · utility
36Cited by
7References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 1994 |
| Grant date | Jan 9, 1996 |
| Priority date | — |
| Expiry date | Jan 21, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning microscope wherein the probe operates at all times in alignment with the piezoelectric element providing the scanning motion. A sample is slidably connected to the piezoelectric element and the target area on the sample is positioned substantially coaxially with the probe and the scanning element prior to commencement of the scanning operation. A particular embodiment of a sample positioner is provided that eliminates any interference by the positioner with the sample during scanning.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.