Adrian Siegrist
1Patents
1h-index
9Co-inventors
25Inventor score
Filing activity: Jun 27, 2002 → Jun 27, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6899784B1 | Apparatus for detecting CMP endpoint in acidic slurries | Electricity | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.