Inventor · Tokyo, JP

Akiya Nakai

9Patents
8h-index
13Co-inventors
62Inventor score

Filing activity: Oct 2, 1987 → Jun 23, 1998

Most-cited inventions

PatentTitleAreaCited byStatus
US5543921A Aligning method utilizing reliability weighting coefficients Physics 64 Expired
US6253248A Information processing apparatus and method Electricity 59 Expired
US6333786A Aligning method Physics 31 Expired
US4918320A Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment Physics 25 Expired
US6466968B2 Information processing system capable of file transmission and information processing apparatus in the system Electricity 23 Expired
US4811059A Alignment method Physics 11 Expired
US5563708A Semiconductor device manufacturing method wherein the substrate is interferically aligned by measuring the rotation of the original Physics 10 Expired
US6097495A Aligning method Physics 8 Expired
US4881100A Alignment method Physics 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.