Allan L. Sagle
4Patents
4h-index
20Co-inventors
46Inventor score
Filing activity: Jan 6, 1999 → Jun 8, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6724002B2 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Electricity | 25 | Expired |
| US6262429A | Raster shaped beam, electron beam exposure strategy using a two dimensional multipixel flash field | Electricity | 16 | Expired |
| US7961912B2 | Method and apparatus for dynamic space-time imaging system | Human Necessities | 16 | Active |
| US6326635A | Minimization of electron fogging in electron beam lithography | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.