André Orthen
2Patents
1h-index
8Co-inventors
30Inventor score
Filing activity: Aug 28, 2018 → Dec 5, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10514608B2 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Physics | 3 | Active |
| US11048172B2 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.