Arne Benson
3Patents
2h-index
4Co-inventors
30Inventor score
Filing activity: Dec 26, 2001 → Jun 14, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7422031B2 | Rotary unions, fluid delivery systems, and related methods | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6807984B2 | High flow high control valve and assembly | Emerging Cross-Sectional Technologies | 8 | Expired |
| US7556697B2 | System and method for carrying out liquid and subsequent drying treatments on one or more wafers | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.