Arnold Sinke
5Patents
1h-index
9Co-inventors
40Inventor score
Filing activity: Jun 1, 1998 → Oct 12, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8994921B2 | Scatterometer and lithographic apparatus | Physics | 2 | Active |
| US7109498B2 | Radiation source, lithographic apparatus, and device manufacturing method | Electricity | 1 | Expired |
| US7473915B2 | System and method to pattern an object through control of a radiation source | Electricity | 0 | Active |
| US7298455B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Expired |
| US6166485A | Electron gun with heat dissipation elements | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.