Inventor · Shibukawa, JP

Atsumi Ito

2Patents
2h-index
3Co-inventors
30Inventor score

Filing activity: Dec 16, 1997 → May 11, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6156121A Wafer boat and film formation method Electricity 10 Expired
US6344387B1 Wafer boat and film formation method Electricity 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.