Axel Henke
2Patents
1h-index
9Co-inventors
37Inventor score
Filing activity: Aug 14, 2002 → Aug 16, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6897155B2 | Method for etching high-aspect-ratio features | Electricity | 3 | Expired |
| US10084057B2 | NVM device in SOI technology and method of fabricating an according device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.