Benoit Barthod
7Patents
5h-index
13Co-inventors
56Inventor score
Filing activity: Feb 3, 1994 → Dec 29, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7399981B2 | Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography | Electricity | 14 | Expired |
| US7095038B2 | EUV source | Electricity | 12 | Expired |
| US5439357A | Magnetically guided positive-displacement machine | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| US6027317A | Scroll type machine | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US5370508A | Positive-displacement machine having orbital motion | Mechanical Engineering; Lighting; Heating | 5 | Expired |
| US6050793A | Scroll type fluid displacement machine | Mechanical Engineering; Lighting; Heating | 5 | Expired |
| US7515687B2 | Compact source with very bright X-ray beam | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.