Inventor · Dresden, DE

Bernd Kochan

1Patents
1h-index
3Co-inventors
25Inventor score

Filing activity: Aug 13, 2004 → Aug 13, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US7252913B2 Method for projection of a circuit pattern, which is arranged on a mask, onto a semiconductor wafer Physics 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.