Inventor · Yongin-si, KR

Byeonghwan Jeon

6Patents
2h-index
12Co-inventors
48Inventor score

Filing activity: Oct 22, 1996 → Jan 17, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US5883610A Graphics overlay device Physics 24 Expired
US5742383A Apparatus for measuring degree of inclination of objective lens for optical pickup Physics 10 Expired
US10474133B2 Inspection device for inspecting wafer and method of inspecting wafer using the same Electricity 2 Active
US10489902B2 Inspection apparatus, semiconductor device manufacturing system including the same, and method of manufacturing a semiconductor device using the same Physics 1 Active
US9915623B2 Optical inspection apparatus, a method of inspecting a substrate, and a method of treating a substrate Physics 0 Active
US10732129B2 Apparatus for and method of performing inspection and metrology process Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.