Changgil Son
1Patents
0h-index
3Co-inventors
19Inventor score
Filing activity: Jan 25, 2023 → Jan 25, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12327731B2 | Etching gas mixture and method of manufacturing integrated circuit device using the same | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.