Changle Guan
3Patents
1h-index
8Co-inventors
33Inventor score
Filing activity: Dec 3, 2014 → Aug 26, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10854482B2 | Reaction chamber and plasma processing apparatus | Electricity | 1 | Active |
| US12009184B2 | Lift pin assembly for a plasma processing apparatus | Electricity | 0 | Active |
| US12347661B2 | Pressure control system for a multi-head processing chamber of a plasma processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.