Changsoon Lim
3Patents
0h-index
14Co-inventors
25Inventor score
Filing activity: Oct 22, 2021 → Jul 27, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12431341B2 | Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis method | Electricity | 0 | Active |
| US12087550B2 | Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the same | Electricity | 0 | Active |
| US11940620B2 | Method of cleaning collector of EUV light source system | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.