Chao Chang
5Patents
1h-index
8Co-inventors
36Inventor score
Filing activity: Sep 5, 2016 → Oct 21, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11545827B2 | Surge protection apparatus having embedded fuse | Electricity | 2 | Active |
| US11460418B2 | Methods and systems for semiconductor metrology based on wavelength resolved soft X-ray reflectometry | Physics | 1 | Active |
| US11259394B2 | Laser produced plasma illuminator with liquid sheet jet target | Electricity | 0 | Active |
| US11272607B2 | Laser produced plasma illuminator with low atomic number cryogenic target | Electricity | 0 | Active |
| US11557462B2 | Collecting and recycling rare gases in semiconductor processing equipment | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.