Patent · US Active

Collecting and recycling rare gases in semiconductor processing equipment

US11557462B2 · kind B2 · utility

0Cited by

7References

20Claims

0Family size

Assignee

KLA Corporation · US

Inventors

Chao Chang · San Jose, US
Michael Friedmann · Nesher, IL

Key dates

Filing date	Mar 10, 2020
Grant date	Jan 17, 2023
Priority date	—
Expiry date	Mar 20, 2041

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF25J2215/36
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.