Inventor · Santa Clara, CA, US

Charles E. Pomeroy

5Patents
5h-index
7Co-inventors
52Inventor score

Filing activity: Jul 5, 1994 → Sep 7, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US8033771B1 Minimum contact area wafer clamping with gas flow for rapid wafer cooling Emerging Cross-Sectional Technologies 474 Active
US5425803A Device for removing dissolved gas from a liquid Chemistry; Metallurgy 40 Expired
US5772736A Device for removing dissolved gas from a liquid Chemistry; Metallurgy 18 Expired
US5645625A Device for removing dissolved gas from a liquid Chemistry; Metallurgy 15 Expired
US8454294B2 Minimum contact area wafer clamping with gas flow for rapid wafer cooling Emerging Cross-Sectional Technologies 10 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.