Chen-Shao Hsu
8Patents
1h-index
10Co-inventors
44Inventor score
Filing activity: Mar 7, 2013 → Jun 17, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11687006B2 | Method of manufacturing photo masks | Physics | 2 | Active |
| US8999611B2 | Mask blank for scattering effect reduction | Physics | 1 | Active |
| US9017903B2 | Mask overlay control | Physics | 0 | Active |
| US10816892B2 | Method of manufacturing photo masks | Physics | 0 | Active |
| US11327405B2 | Method of manufacturing photo masks | Physics | 0 | Active |
| US12038693B2 | Method of manufacturing photo masks | Physics | 0 | Active |
| US12298673B2 | Method of manufacturing photo masks | Physics | 0 | Active |
| US9377701B2 | Mask overlay control | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.