Chi-Yang Cheng
2Patents
0h-index
14Co-inventors
28Inventor score
Filing activity: Sep 4, 2019 → Oct 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12278124B2 | Model-based controlled load lock pumping scheme | Electricity | 0 | Active |
| US11473978B2 | Enhanced substrate temperature measurement apparatus, system and method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.