Patent · US Active

Enhanced substrate temperature measurement apparatus, system and method

US11473978B2 · kind B2 · utility

0Cited by

2References

15Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Dawei Sun · Suqian, CN
D. Jeffrey Lischer · Acton, US
Qin Chen · Schenectady, US
Dale K. Stone · Lynnfield, US
Lyudmila Stone · Lynnfield, US
Steven M. Anella · West Newbury, US
Ron Serisky · Gloucester, US
Chi-Yang Cheng · Lebanon, US

Key dates

Filing date	Sep 4, 2019
Grant date	Oct 18, 2022
Priority date	—
Expiry date	Oct 4, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01K13/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.