Chikara MAEDA
4Patents
1h-index
9Co-inventors
33Inventor score
Filing activity: Jul 2, 2014 → Nov 29, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11101147B2 | Substrate processing method and substrate processing apparatus | Electricity | 3 | Active |
| US10530154B2 | Control apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US10074980B2 | Control apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US11302525B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.