Chris Lary
2Patents
1h-index
—Co-inventors
24Inventor score
Filing activity: Dec 21, 2015 → Aug 9, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10056276B2 | Fluid monitoring system and method for semiconductor fabrication tools | Physics | 1 | Active |
| US10438826B2 | Fluid monitoring system and method for semiconductor fabrication tools | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.