Craig D. Higgins
3Patents
0h-index
14Co-inventors
28Inventor score
Filing activity: Nov 28, 2017 → Jun 2, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10353288B2 | Litho-litho-etch double patterning method | Physics | 0 | Active |
| US12406197B2 | Prediction and metrology of stochastic photoresist thickness defects | Physics | 0 | Active |
| US10782606B2 | Photolithography methods and structures that reduce stochastic defects | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.