Inventor · Santa Clara, CA, US

Dan Towery

3Patents
3h-index
5Co-inventors
36Inventor score

Filing activity: Apr 11, 2000 → May 14, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6416685B1 Chemical mechanical planarization of low dielectric constant materials Electricity 38 Expired
US6610114B2 Oxidizing polishing slurries for low dielectric constant materials Emerging Cross-Sectional Technologies 8 Expired
US6736992B2 Chemical mechanical planarization of low dielectric constant materials Electricity 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.