Inventor · Lynn, MA, US

David J. Chipman

6Patents
4h-index
14Co-inventors
54Inventor score

Filing activity: Dec 18, 1995 → Jan 22, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US5656092A Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter Electricity 14 Expired
US6583428B1 Apparatus for the backside gas cooling of a wafer in a batch ion implantation system Electricity 10 Expired
US5670217A Method for capturing and removing contaminant particles from an interior region of an ion implanter Electricity 8 Expired
US5987844A Snap-lock vision frame assembly Fixed Constructions 5 Expired
US10157764B2 Thermal shield for electrostatic chuck Electricity 0 Active
US11069554B1 Carbon nanotube electrostatic chuck Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.