Dmitry Sklyar
5Patents
1h-index
20Co-inventors
51Inventor score
Filing activity: May 22, 1996 → Jun 28, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5844683A | Position sensor system for substrate holders | Electricity | 475 | Expired |
| US11693435B2 | Ethercat liquid flow controller communication for substrate processing systems | Physics | 0 | Active |
| US11833637B2 | Control of steam generation for chemical mechanical polishing | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11717936B2 | Methods for a web-based CMP system | Emerging Cross-Sectional Technologies | 0 | Active |
| US11801582B2 | Control of steam generation for chemical mechanical polishing | General | 0 | Revoked |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.