Douglas E. Benoit
5Patents
3h-index
8Co-inventors
42Inventor score
Filing activity: Dec 6, 1994 → Oct 17, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5716763A | Liquid immersion heating process for substrate temperature uniformity | Physics | 11 | Expired |
| US6365326B1 | Pattern density tailoring for etching of advanced lithographic mask | Physics | 8 | Expired |
| US6521383B2 | Pattern density tailoring for etching of advanced lithographic masks | Physics | 7 | Expired |
| US6039858A | Plating process for x-ray mask fabrication | Emerging Cross-Sectional Technologies | 0 | Expired |
| US6287434A | Plating cell apparatus for x-ray mask fabrication | Emerging Cross-Sectional Technologies | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.