Inventor · Hasselt, BE

Dries Smeets

3Patents
0h-index
17Co-inventors
28Inventor score

Filing activity: Jan 24, 2013 → Sep 15, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US9823576B2 Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method Physics 0 Active
US10690812B2 Optical element and optical system for EUV lithography, and method for treating such an optical element Physics 0 Active
US9715183B2 Device, lithographic apparatus, method for guiding radiation and device manufacturing method Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.