Dries Smeets
3Patents
0h-index
17Co-inventors
28Inventor score
Filing activity: Jan 24, 2013 → Sep 15, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9823576B2 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Physics | 0 | Active |
| US10690812B2 | Optical element and optical system for EUV lithography, and method for treating such an optical element | Physics | 0 | Active |
| US9715183B2 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.