Edward Tseng
4Patents
3h-index
13Co-inventors
47Inventor score
Filing activity: Oct 24, 2007 → Nov 21, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7825386B2 | System and method for a charged particle beam | Electricity | 10 | Active |
| US8164060B2 | System and method for a charged particle beam | Electricity | 6 | Active |
| US7919760B2 | Operation stage for wafer edge inspection and review | Electricity | 6 | Active |
| US10400167B2 | Etching compositions and methods for using same | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.