Inventor · Chelmsford, MA, US

Edward Tsidilkovski

2Patents
2h-index
1Co-inventors
27Inventor score

Filing activity: Mar 28, 2003 → Mar 14, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US6911350B2 Real-time in-line testing of semiconductor wafers Electricity 7 Expired
US7403023B2 Apparatus and method of measuring defects in an ion implanted wafer by heating the wafer to a treatment temperature and time to substantially stabilize interstitial defect migration while leaving the vacancy defects substantially unaltered. Electricity 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.