Eldar Khaliullin
3Patents
2h-index
3Co-inventors
30Inventor score
Filing activity: Apr 15, 2013 → Jul 25, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8719739B2 | Method and system for forming patterns using charged particle beam lithography | Physics | 16 | Active |
| US9400857B2 | Method and system for forming patterns using charged particle beam lithography | Physics | 5 | Active |
| US10031413B2 | Method and system for forming patterns using charged particle beam lithography | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.