Inventor · Sunnyvale, CA, US

Emery Kuo

1Patents
1h-index
5Co-inventors
25Inventor score

Filing activity: Dec 21, 2010 → Dec 21, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US8431033B2 High density plasma etchback process for advanced metallization applications Electricity 7 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.