Eric Munro
9Patents
5h-index
47Co-inventors
59Inventor score
Filing activity: Mar 17, 1994 → Aug 16, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5578821A | Electron beam inspection system and method | Electricity | 268 | Expired |
| US5502306A | Electron beam inspection system and method | Electricity | 259 | Expired |
| US7141791B2 | Apparatus and method for E-beam dark field imaging | Electricity | 44 | Expired |
| US7164139B1 | Wien filter with reduced chromatic aberration | Electricity | 12 | Expired |
| US7217924B1 | Holey mirror arrangement for dual-energy e-beam inspector | Electricity | 12 | Expired |
| US6440620B1 | Electron beam lithography focusing through spherical aberration introduction | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6441378B1 | Magnetic energy filter | Electricity | 2 | Expired |
| US6420714B1 | Electron beam imaging apparatus | Electricity | 2 | Expired |
| US6620565B2 | Electron beam lithography apparatus focused through spherical aberration introduction | Emerging Cross-Sectional Technologies | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.