Eric Shurtliff
5Patents
5h-index
5Co-inventors
45Inventor score
Filing activity: Jul 8, 1996 → Nov 26, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5950327A | Methods and apparatus for cleaning and drying wafers | Emerging Cross-Sectional Technologies | 392 | Expired |
| US5975094A | Method and apparatus for enhanced cleaning of a workpiece with mechanical energy | Electricity | 31 | Expired |
| US5899216A | Apparatus for rinsing wafers in the context of a combined cleaning rinsing and drying system | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6006391A | Workpiece cleaning element with improved rib configuration | Performing Operations; Transporting | 15 | Expired |
| US5870792A | Apparatus for cleaning wafers and discs | Physics | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.