Apparatus for cleaning wafers and discs
US5870792A · kind A · utility
12Cited by
9References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 31, 1997 |
| Grant date | Feb 16, 1999 |
| Priority date | — |
| Expiry date | Mar 31, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B23/505
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An apparatus for cleaning workpieces such as magnetic recording discs, optical discs, and semiconductor wafers includes a sponge-like material surrounded on two sides by substantially rigid plates that serve as an exoskeleton support for the sponge-like material. The plates include a number of apertures formed therein. The sponge-like material protrudes through the apertures of the plates, allowing the sponge-like material to contract a surface of the workpiece during the cleaning process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.