Inventor · Eschen, LI

Ernst W. Loebach

4Patents
4h-index
2Co-inventors
40Inventor score

Filing activity: May 24, 1979 → Feb 28, 1992

Most-cited inventions

PatentTitleAreaCited byStatus
US4390273A Projection mask as well as a method and apparatus for the embedding thereof and projection printing system Emerging Cross-Sectional Technologies 468 Expired
US4355892A Method for the projection printing Physics 36 Expired
US5284054A Method and apparatus for preparing a gas mixture for purposes of analysis and application of the method Physics 24 Expired
US4215935A Method and device for the projection printing of a mask onto a semiconductor substrate Physics 7 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.