Felipe Soberon
6Patents
3h-index
6Co-inventors
46Inventor score
Filing activity: Aug 12, 2010 → Sep 25, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9842726B2 | Method and apparatus for the detection of arc events during the plasma processing of a wafer, surface of substrate | Electricity | 11 | Active |
| US9370599B2 | Coil assembly for plasma generation | Electricity | 6 | Active |
| US9327048B2 | Air treatment device having a plasma coil electrostatic precipitator assembly | Emerging Cross-Sectional Technologies | 6 | Active |
| US8945467B2 | Method and apparatus for the sterilisation of articles | Emerging Cross-Sectional Technologies | 3 | Active |
| US10786593B2 | Flexible electrode assembly for plasma generation and air treatment system including the flexible electrode assembly | Emerging Cross-Sectional Technologies | 2 | Active |
| US11821655B2 | Air treatment system, method and apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.