Fred E. Mitchel
3Patents
3h-index
12Co-inventors
40Inventor score
Filing activity: Feb 13, 1997 → Dec 16, 1998
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5851140A | Semiconductor wafer polishing apparatus with a flexible carrier plate | Performing Operations; Transporting | 171 | Expired |
| US6056632A | Semiconductor wafer polishing apparatus with a variable polishing force wafer carrier head | Performing Operations; Transporting | 128 | Expired |
| US6261158A | Multi-step chemical mechanical polishing | Electricity | 25 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.