Fusami Soeda
1Patents
1h-index
11Co-inventors
29Inventor score
Filing activity: Jun 6, 1994 → Jun 6, 1994
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5517027A | Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these | Emerging Cross-Sectional Technologies | 32 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.