Gary Hsueh
4Patents
4h-index
12Co-inventors
47Inventor score
Filing activity: May 12, 1997 → Feb 14, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6547977B1 | Method for etching low k dielectrics | Electricity | 291 | Expired |
| US5856906A | Backside gas quick dump apparatus for a semiconductor wafer processing system | Emerging Cross-Sectional Technologies | 16 | Expired |
| US8769691B1 | Network traffic reduction | Electricity | 10 | Active |
| US7265382B2 | Method and apparatus employing integrated metrology for improved dielectric etch efficiency | Electricity | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.