Inventor · Birkenfeld, DE

Gerd Unger

2Patents
1h-index
6Co-inventors
33Inventor score

Filing activity: Sep 13, 2000 → Jan 30, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7644389B2 Method for producing a mask for the lithographic projection of a pattern onto a substrate Physics 4 Active
US6972832B1 Method of grounding a photoblank to a holding device Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.