Haiyang Xu
18Patents
1h-index
38Co-inventors
46Inventor score
Filing activity: Jan 11, 2017 → Jun 28, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11164757B2 | Substrate cleaning device and substrate cleaning method | Electricity | 1 | Active |
| US11862143B2 | Systems and methods for processing speech dialogues | Physics | 0 | Active |
| US12002688B2 | Substrate cleaning device and substrate cleaning method | Electricity | 0 | Active |
| US11541502B2 | Substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US11828911B1 | Metamaterial absorber integrated long-wave infrared focal plane array (LWIRFPA) | Physics | 0 | Active |
| US12412361B2 | Entity recognition method and apparatus, and computer program product | Physics | 0 | Active |
| US12174917B2 | Data processing method | Physics | 0 | Active |
| US11869788B2 | Substrate processing device | Electricity | 0 | Active |
| US10438817B2 | Cleaning apparatus and substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US12020976B2 | Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus | Electricity | 0 | Active |
| US12151335B1 | Monitoring method for chemical mechanical polishing and chemical mechanical polishing device | Performing Operations; Transporting | 0 | Active |
| US10818531B2 | Substrate transport system, substrate processing apparatus, hand position adjustment method | Electricity | 0 | Active |
| US11983492B2 | Adversarial multi-binary neural network for multi-class classification | Physics | 0 | Active |
| US11996303B2 | Substrate cleaning device and substrate cleaning method | Electricity | 0 | Active |
| US12042901B2 | Cleaning liquid supply device, cleaning unit, and storage medium storing program | Electricity | 0 | Active |
| US11358253B2 | Cleaning liquid supply device, cleaning unit, and storage medium storing program | Electricity | 0 | Active |
| US11380561B2 | Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device | Electricity | 0 | Active |
| US10991615B2 | Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.