Inventor · Tokyo, JP

Haiyang Xu

18Patents
1h-index
38Co-inventors
46Inventor score

Filing activity: Jan 11, 2017 → Jun 28, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US11164757B2 Substrate cleaning device and substrate cleaning method Electricity 1 Active
US11862143B2 Systems and methods for processing speech dialogues Physics 0 Active
US12002688B2 Substrate cleaning device and substrate cleaning method Electricity 0 Active
US11541502B2 Substrate processing apparatus Performing Operations; Transporting 0 Active
US11828911B1 Metamaterial absorber integrated long-wave infrared focal plane array (LWIRFPA) Physics 0 Active
US12412361B2 Entity recognition method and apparatus, and computer program product Physics 0 Active
US12174917B2 Data processing method Physics 0 Active
US11869788B2 Substrate processing device Electricity 0 Active
US10438817B2 Cleaning apparatus and substrate processing apparatus Performing Operations; Transporting 0 Active
US12020976B2 Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus Electricity 0 Active
US12151335B1 Monitoring method for chemical mechanical polishing and chemical mechanical polishing device Performing Operations; Transporting 0 Active
US10818531B2 Substrate transport system, substrate processing apparatus, hand position adjustment method Electricity 0 Active
US11983492B2 Adversarial multi-binary neural network for multi-class classification Physics 0 Active
US11996303B2 Substrate cleaning device and substrate cleaning method Electricity 0 Active
US12042901B2 Cleaning liquid supply device, cleaning unit, and storage medium storing program Electricity 0 Active
US11358253B2 Cleaning liquid supply device, cleaning unit, and storage medium storing program Electricity 0 Active
US11380561B2 Cleaning device, substrate processing apparatus, maintenance method of cleaning device, and computer-readable recording medium including maintenance program of cleaning device Electricity 0 Active
US10991615B2 Substrate processing apparatus and method for removing substrate from table of substrate processing apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.