Harunobu Muto
1Patents
1h-index
4Co-inventors
25Inventor score
Filing activity: Jul 10, 2003 → Jul 10, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6946662B2 | Multi-charged beam lens, charged-particle beam exposure apparatus using the same, and device manufacturing method | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.